Modular laminar flow systems

The Handbook of Facilities Planning (1990) describes cleanroom workstations and benches using modular laminar air flow.

Cleanroom devices are mostly thought of as modular laminar flow systems, also called benches. However, the definition can be extended to cover everything from glove boxes through mini-environment cleanrooms. In fact, the growing emphasis on mini-environments for the semiconductor industry is blurring the distinction between devices and rooms. There is a tremendous opportunity to marry the modular laminar flow station technology with the ballroom cleanroom technology to provide zones with various degrees of cleanliness throughout the room.


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