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Case Studies
Applied
Materials: Chilled Water Plant Efficiency Upgrade
A chiller variable speed drive (VSD) contributes a large potion
of energy savings of $74,000 per year at Applied Materials. While most
cleanroom facilities operate plants with multiple chillers, they need
only a single VSD on the smallest chiller to realize the full benefits.
Given that plants need not be shutdown and that very little equipment
must be altered or replaced, VSDs can be cost effective for virtually
all cleanroom plants. However, not all existing chillers can be retrofitted
with VSDs.
Genentech:
New Energy Efficient Pharmaceutical Manufacturing Cleanroom Facility
A total of twenty-two separate energy efficiency measures were
performed at the Genentech's Vacaville site. These efficiency measures
have not inhibited Genentech from complying with strict FDA regulations
for pharmaceutical plants. The plant it is expected to operate more reliably
with these modifications and had an excellent payback of 1.7 years.
Hine
Design: Variable Speed Drive Control of Recirculation Fans for Class 100
Cleanroom
A firm designed and implemented new control logic at the robotics
manufacturing facility of Hine Design in Sunnyvale, California. Two specific
controls were retrofitted onto the system serving the class 100 bays to
provide the energy saving benefits: Variable speed drives (VSDs) on the
FPHs serving the class 100 bays and a custom control system that schedules
the speed of the VSDs based upon occupancy patterns. Our measurements
show an 82% reduction in fan power.
Motorola:
Cleanroom Declassification from Class 10,000 to Class 100,000
The purpose of this project was to reduce operational costs
and energy use by reducing the classification of the cleanroom at the
Motorola AIEG facility in Northbrook, Illinois, from class 10,000 to class
100,000. To accomplish this airflow was reduced but the ceiling grid and
number of HEPA filters remained the same to allow for future flexibility
in the cleanrooms. Measures were also implemented to improve temperature
and humidity control to reduce unnecessary dehumidifying when the outside
air is already below the cleanroom humidity setpoint.
Western
Digital: Comprehensive Cleanroom Facility Renovation and Cleanliness Upgrade
The renovation of a Western Digital facility in Kuala Lumpur,
Malaysia, called for an increase in floor area and an increase in the
cleanliness requirements for the cleanroom from class 10,000 to class
10. It was expected that the increase in floor area and cleanliness would
increase loads substantially. Instead, through innovative design and careful
attention to system effects on energy efficiency, the remodeled building
used 44% less energy than the original facility. In addition to the efficient
components of the design, WD was able to eliminate the use of environmentally
harmful CFCs used in the chillers.
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This page last updated 26 April 02
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