What is a Cleanroom?
Why Benchmark Cleanrooms?
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Goal - Cleanroom Energy Database
Goal - Cleanroom Energy Performance Metrics
Goal - Performance Evaluation Tools
Cleanroom Energy Benchmark Results
Future Work
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Energy Efficient Cleanrooms Website
Cleanroom Energy Benchmarking HOME

Goals in Cleanroom Energy Benchmarking

The first goal is to develop an increasingly robust database so as to:

  • establish a baseline for cleanroom energy use
  • provide comparison to other similar cleanrooms and/or similar systems
  • highlight energy intensive systems and components
  • highlight areas of potential improvement
  • identify maintenance or operating problems
  • establish best practices for use in future designs