Goals in Cleanroom Energy Benchmarking

The first goal is to develop an increasingly robust database so as to:

• establish a baseline for cleanroom energy use
• provide comparison to other similar cleanrooms and/or similar systems
• highlight energy intensive systems and components
• highlight areas of potential improvement
• identify maintenance or operating problems
• establish best practices for use in future designs

The second goal is to establish cleanroom systems' energy performance metrics for use by facility managers, designers, and engineers.

The third goal is to develop evaluation tools that allow users to evaluate individual cleanroom energy performance and to provide information to identify energy saving opportunities.