Cleanrooms are highly energy intensive to operate. Cleanroom systems include process equipment, HVAC systems, lighting, etc. HVAC systems in cleanrooms are dramatically different from their counterparts in commercial buildings in terms of reliability, safety requirements, and scale. Benchmarking energy use in cleanrooms is particularly important in that there is little industry data available to compare energy use. The lack of energy data and standard metrics makes comparison difficult or impossible. It is also difficult to set appropriate design goals, compare performance over time, and compare performance against other similar cleanrooms. Cleanroom energy benchmarking can provide baseline information to better understand cleanroom energy performance, and can provide information to identify energy saving opportunities.